Up to 0.5 um measurement accuracy
  Up to 0.1 um resolution
  Up to 0.1 um repeatability
  Up to 0.35 um spot size
  Up to 0.2 um lateral resolution
  Up to 700 Hz sample rate
  0.2 mm - 180 mm working range 
 

  Up to 1 nm measurement accuracy
  Up to 2 nm resolution
  Up to 3 um spot size
  Up to 1.5 um lateral resolution
  Up to 4000 Hz sample rate
  0.237 mm - 223 mm working range 
 

  Up to 1.25 mm x 1.1 mm measurement area
  Up to 10 nm measurement accuracy
  Up to 20 mm measurement range
  Up to 1 nm resolution
  Up to 1 um lateral resolution
  780 x 560 image size
  High scan speed
  0.34 mm - 7 mm working distance
 

  Optimized compression algorithm for large data sets
  Mouse drag controlled rotation, pan and zoom
  Animation
  Predefined and user defined palettes
  1D cut plot (intersections) read out
  Waviness and roughness measurement
  Interactive mouse operating distance, area and volume measurement
  Hole analysis: volume, surface, perimeter, mean and max depth
  Measurement Report
  Elevation Z Low-High cut-off filter
  Geometrical transformation: zoom, inversion
  Leveling, form removal
  Smooth surface filter
  Contour plots
  Image 3D rendering